Crystalline Silicon Solar Cells with Thin Silicon Passivation Film Deposited prior to Phosphorous Diffusion

<table>Process flow diagram for three groups of solar cells fabricated in this study. A, B, and C denote, respectively, the main fabrication steps for the three different groups.</table>

International Journal of Photoenergy

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Figure 1

Figure 1: Crystalline Silicon Solar Cells with Thin Silicon Passivation Film Deposited prior to Phosphorous Diffusion 