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International Journal of Photoenergy
Volume 2014, Article ID 515268, 7 pages
Research Article

Fabrication of a Miniature Zinc Aluminum Oxide Nanowire Array Gas Sensor and Application for Environmental Monitoring

1Department of Industrial Education, National Taiwan Normal University, Taipei 10610, Taiwan
2Material and Chemical Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan

Received 10 April 2014; Accepted 14 May 2014; Published 10 June 2014

Academic Editor: Ho Chang

Copyright © 2014 Chin-Guo Kuo et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


A miniature n-type semiconductor gas sensor was fabricated successfully using zinc aluminum oxide nanowire array and applied to sense oxygen. The present study provided a novel method to produce zinc aluminum alloy nanowire 80 nm in diameter by the vacuum die casting technique and then obtain zinc aluminum oxide nanowire array using the thermal oxidation technique. The gas sensing properties were evaluated through the change of the sensitivity. The factors influencing the sensitivity of the gas sensor, such as the alloy composition, operating temperature, and oxygen concentration, were investigated further. Experimental results indicated that the maximum sensitivity could be acquired when the weight percentage of aluminum was 5% in zinc aluminum alloy at the operating temperature of .