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International Journal of Photoenergy
Volume 2014 (2014), Article ID 637532, 7 pages
Research Article

Photocatalytic Activity of Hierarchically Structured TiO2 Films Synthesized by Chemical Vapor Deposition

1Department of Environmental Engineering, Sunchon National University, Sunchon, Jeonnam 540-742, Republic of Korea
2School of Environmental Engineering, University of Seoul, Seoul 130-743, Republic of Korea
3Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 143-747, Republic of Korea
4Department of Dental Materials, School of Dentistry, Chosun University, Gwangju 501-759, Republic of Korea
5Department of Architecture Engineering, Sunchon National University, Sunchon, Jeonnam 540-742, Republic of Korea

Received 28 January 2014; Accepted 7 February 2014; Published 10 March 2014

Academic Editor: Kangle Lv

Copyright © 2014 Heon Lee et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Hierarchically structured TiO2 photocatalyst films were synthesized using low-pressure metal-organic chemical vapor deposition (LPMOCVD) method to examine their photocatalytic activity. The thickness of the TiO2 films increased proportionally with increasing deposition time. The TiO2 film synthesized at 773 K showed a hierarchical structure composed of vertically grown laminar (112)-oriented anatase crystals. With increasing deposition time, the grain became larger and the morphology became sharper. In the initial CVD stage, small particular crystals were formed, above which sequential growth of layers of columnars with increasing size took place, forming hierarchical structure. The hierarchically structured TiO2 film exhibited much higher photocatalytic activity than unhierarchically structured TiO2 film. The photocatalytic activity increased with increasing film thickness.