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International Journal of Photoenergy
Volume 2014 (2014), Article ID 683037, 8 pages
Research Article

OLED Fabrication by Using a Novel Planar Evaporation Technique

1Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
2Mechanical and Systems Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan
3Center for Nanotechnology, Materials Science, and Microsystems, National Tsing Hua University, Hsinchu 30013, Taiwan

Received 13 March 2014; Revised 15 May 2014; Accepted 23 May 2014; Published 22 June 2014

Academic Editor: Liang-Sheng Liao

Copyright © 2014 Fu-Ching Tung et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Organic light-emitting diode fabrication is suffering from extremely high material wasting during deposition especially using a typical point or even line source. Moreover, the need of depositing a high number of emitters and host(s) with a precise composition control in a single layer makes traditional vapor codeposition systems nearly impossible, unless otherwise with a very low yield. To improve, we have developed a novel thin-film deposition system with a planar source loadable with any premetered solvent-mixed organic compounds, plausibly with no component number limitation. We hence demonstrate experimentally, along with a Monte Carlo simulation, in the report the feasibility of using the technique to deposit on a large area-size substrate various organic materials with a relatively high material utilization rate coupling with high film uniformity. Specifically, nonuniformity of less than ±5% and material utilization rate of greater than 70% have been obtained for the studied films.