OLED Fabrication by Using a Novel Planar Evaporation Technique

Table 2

Thickness of the “Alq3” thin films deposited by the planar source.

Position	1	2	3	4	5	6	7	8
Thickness (nm)	151.71	149.59	150.82	153.53	161.03	154.64	152.15	158.46