The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering

Table 1

Sample names of ZnS thin films deposited in different sputtering atmosphere.

	Pressure
	0.5 Pa				0.2 Pa
Ar/H2 ratio	25 : 0	25 : 1	25 : 2	25 : 3	25 : 0	25 : 1	25 : 2	25 : 3
Sample name	0.5P-Ar	0.5P-H	0.5P-2H	0.5P-3H	0.2P-Ar	0.2P-H	0.2P-2H	0.2P-3H