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International Journal of Photoenergy
Volume 2014, Article ID 786165, 8 pages
http://dx.doi.org/10.1155/2014/786165
Research Article

The Photocatalytic Activity and Compact Layer Characteristics of TiO2 Films Prepared Using Radio Frequency Magnetron Sputtering

1Department of Mechanical Engineering, National Chiao Tung University, 1001 University Road, Hsinchu 30010, Taiwan
2Department of Mechanical Engineering, Lunghwa University of Science and Technology, No. 300, Sec. 1, Wanshou Road, Guishan, Taoyuan 33306, Taiwan

Received 7 March 2014; Revised 18 April 2014; Accepted 18 April 2014; Published 22 May 2014

Academic Editor: Ho Chang

Copyright © 2014 H. C. Chang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

H. C. Chang, H. H. Huang, C. Y. Wu, R. Q. Hsu, and C. Y. Hsu, “The Photocatalytic Activity and Compact Layer Characteristics of TiO2 Films Prepared Using Radio Frequency Magnetron Sputtering,” International Journal of Photoenergy, vol. 2014, Article ID 786165, 8 pages, 2014. https://doi.org/10.1155/2014/786165.