The Photocatalytic Activity and Compact Layer Characteristics of TiO₂ Films Prepared Using Radio Frequency Magnetron Sputtering

Table 3

The ANOVA results for the deposition rate, the water contact angle, and the MB absorbance.

Factor	Degree of freedom	Sum of square	Variance	Contribution; (P %)
Deposition rate (Å/min)
𝐴	2	74.4166	37.2083	84.45
𝐵	2	6.1132	3.0566	6.93
𝐶	2	6.1644	3.0822	7.00
𝐷	2	1.4211	0.7106	1.62
Total	8	88.1153		100
Water contact angle (degree)
𝐴	2	4.4559	2.22793	33.68
𝐵	2	4.4483	2.22417	33.62
𝐶	2	3.7790	1.88950	28.56
𝐷	2	0.5472	0.27359	4.14
Total	8	13.2304		100
MB absorbance
𝐴	2	2.80223	1.40111	54.36
𝐵	2	0.72560	0.36280	14.07
𝐶	2	1.03120	0.51560	20.00
𝐷	2	0.59634	0.29817	11.57
Total	8	5.15538		100