Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition

<table>Absorption spectra <svg height="15.0875" id="M41" style="vertical-align:-2.21957pt" version="1.1" viewbox="0 0 32.387501 15.0875" width="32.387501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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q-14 98 -31 149.5t-50 51.5q-49 0 -94 -70t-45 -164q0 -55 15.5 -86t40.5 -31q70 0 164 150z" id="x1D6FC"></path></g><g transform="matrix(.017,-0,0,-.017,9.718,12.138)"><path d="M300 -147l-18 -23q-106 71 -159 185.5t-53 254.5v1q0 139 53 252.5t159 186.5l18 -24q-74 -62 -115.5 -173.5t-41.5 -242.5q0 -130 41.5 -242.5t115.5 -174.5z" id="x28"></path></g><g transform="matrix(.017,-0,0,-.017,15.599,12.138)"><path d="M615 290q0 -148 -114 -245q-65 -57 -125 -57q-39 0 -62 27t-29 70q-31 -41 -72 -69t-74 -28q-49 0 -82.5 43t-33.5 124q0 97 55 174.5t148 124.5l15 -24q-59 -45 -94 -113t-35 -146q0 -58 19.5 -88.5t48.5 -30.5q33 0 62 34.5t45 101.5q16 73 20 135l80 17l5 -6
q-11 -37 -23.5 -100t-12.5 -92q0 -47 16.5 -71.5t44.5 -24.5q62 0 95.5 67t33.5 160q0 107 -63 152l1 9q14 14 45 14q29 0 57.5 -44t28.5 -114z" id="x1D714"></path></g><g transform="matrix(.017,-0,0,-.017,26.445,12.138)"><path d="M275 270q0 -296 -211 -440l-19 23q75 62 116.5 174t41.5 243t-42 243t-116 173l19 24q211 -144 211 -440z" id="x29"></path></g>
</svg> of the i-Si films deposited with various assisting laser powers. The inset shows the absorption spectrum <svg height="15.0875" id="M42" style="vertical-align:-2.21957pt" version="1.1" viewbox="0 0 50.237499 15.0875" width="50.237499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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q-14 98 -31 149.5t-50 51.5q-49 0 -94 -70t-45 -164q0 -55 15.5 -86t40.5 -31q70 0 164 150z" id="x1D6FC"></path></g><g transform="matrix(.017,-0,0,-.017,9.718,12.138)"><path d="M300 -147l-18 -23q-106 71 -159 185.5t-53 254.5v1q0 139 53 252.5t159 186.5l18 -24q-74 -62 -115.5 -173.5t-41.5 -242.5q0 -130 41.5 -242.5t115.5 -174.5z" id="x28"></path></g><g transform="matrix(.017,-0,0,-.017,15.599,12.138)"><path d="M615 290q0 -148 -114 -245q-65 -57 -125 -57q-39 0 -62 27t-29 70q-31 -41 -72 -69t-74 -28q-49 0 -82.5 43t-33.5 124q0 97 55 174.5t148 124.5l15 -24q-59 -45 -94 -113t-35 -146q0 -58 19.5 -88.5t48.5 -30.5q33 0 62 34.5t45 101.5q16 73 20 135l80 17l5 -6
q-11 -37 -23.5 -100t-12.5 -92q0 -47 16.5 -71.5t44.5 -24.5q62 0 95.5 67t33.5 160q0 107 -63 152l1 9q14 14 45 14q29 0 57.5 -44t28.5 -114z" id="x1D714"></path></g><g transform="matrix(.017,-0,0,-.017,26.445,12.138)"><path d="M275 270q0 -296 -211 -440l-19 23q75 62 116.5 174t41.5 243t-42 243t-116 173l19 24q211 -144 211 -440z" id="x29"></path></g><g transform="matrix(.017,-0,0,-.017,32.326,12.138)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g><g transform="matrix(.017,-0,0,-.017,39.33,12.138)"><path d="M615 290q0 -148 -114 -245q-65 -57 -125 -57q-39 0 -62 27t-29 70q-31 -41 -72 -69t-74 -28q-49 0 -82.5 43t-33.5 124q0 97 55 174.5t148 124.5l15 -24q-59 -45 -94 -113t-35 -146q0 -58 19.5 -88.5t48.5 -30.5q33 0 62 34.5t45 101.5q16 73 20 135l80 17l5 -6
q-11 -37 -23.5 -100t-12.5 -92q0 -47 16.5 -71.5t44.5 -24.5q62 0 95.5 67t33.5 160q0 107 -63 152l1 9q14 14 45 14q29 0 57.5 -44t28.5 -114z" id="x1D714"></path></g>
</svg> of the i-Si films with assisting laser power of 80 W.</table>

International Journal of Photoenergy

fig3

Figure 3

Figure 3: Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition 

Figure 3 | Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition 