Superior Antireflection Coating for a Silicon Cell with a Micronanohybrid Structure

Figure 1

SEM images of micronanohybrid silicon substrates fabricated by combinations of a fixed first-stage processing time (30 sec) and various second-stage processing times: (a) 1 min, (b) 2 min, (c) 3 min, and (d) 4 min.

(a)

(b)

(c)

(d)