Optical Properties of Spin-Coated TiO₂ Antireflection Films on Textured Single-Crystalline Silicon Substrates

Figure 5

Measured reflection spectra from the textured surface with different TiO₂ ARC structures. (a) ARC films prepared by RF magnetron sputtering. Interference occurs for the wavelength of around 500 nm. (b) The films prepared by spin-coated method. There is no interference.

(a)

(b)