Effect of Dopant Compensation on the Behavior of Dissolved Iron and Iron-Boron Related Complexes in Silicon

Figure 3

The ratio of N()/N(tot) as a function of temperature for CZ-1. Black squares refer to the experimental data, the blue solid line represents a best fit, and the red dash line is a simulated line based on the function of N()/N(tot) = 1/(1 + 2.7 × 10⁻⁶).