Laser Enhanced Hydrogen Passivation of Silicon Wafers

Table 1

The performance variations of finished cast-monocrystalline silicon solar cells before and after laser enhanced hydrogen passivation.

Illumination intensity; (photons/cm^2/s)	Efficiency variation; (%)	Open circuit voltage variation; (V)	Short circuit current variation; (mA/cm^2)	Fill factor variation; (%)
6.1 * 10^18	Δ0.22	Δ0.006	Δ0.13	Δ−0.19
7.2 * 10^18	Δ0.34	Δ0.012	Δ0.21	Δ−0.49
9.6 * 10^18	Δ0.40	Δ0.004	Δ0.23	Δ0.96
9.6 * 10^18	Δ0.61	Δ0.012	Δ0.44	Δ0.30