Optimization of <i>μ</i>c-Si<sub>1−<i>x</i></sub>Ge<sub><i>x</i></sub>:H Single-Junction Solar Cells with Enhanced Spectral Response and Improved Film Quality

<div>Dependence of <i>μ</i>c-Si<sub>1−<i>x</i></sub>Ge<sub><i>x</i></sub>:H film properties, [Ge], <svg height="11.927pt" id="M28" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 16.6986 11.927" width="16.6986pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M748 650H522L515 622L546 617C580 611 587 604 565 575C518 513 469 451 419 393C376 474 349 534 330 580C318 609 325 612 361 618L383 622L392 650H151L144 622C214 616 224 612 257 543L360 327C270 218 187 124 159 95C106 40 92 34 26 28L17 0H252L259 28L236 31C189 37 188 47 209 78C249 136 308 210 377 294L478 79C494 44 487 37 449 32L418 28L409 0H673L680 28C596 34 591 39 554 116L436 361C526 469 574 521 604 553C659 612 669 614 739 622L748 650Z" id="g113-89"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="765" vert-adv-y="765"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,9.88,3.132)"><path d="M690 629C653 643 577 667 483 667C225 667 24 528 24 292C24 92 174 -17 367 -17C448 -17 534 1 570 10C592 34 642 131 658 174C648 180 639 186 629 192C562 89 499 21 382 21C223 21 130 138 130 298C130 467 255 627 462 627C582 627 643 589 650 462L686 466C689 517 688 580 690 629Z" id="g50-68"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="714" vert-adv-y="714"></glyph.data></g></svg>, <svg height="11.927pt" id="M29" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 17.4672 11.927" width="17.4672pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M593 650H142L136 622C219 616 224 611 209 531L130 120C114 39 108 34 23 28L17 0H501C518 32 557 130 568 158L540 169C519 132 495 93 469 70C439 43 409 35 332 35C272 35 241 37 225 50C211 61 211 89 222 149L253 320H350C441 320 443 312 441 239H471L510 434H481C455 366 448 358 360 358H260L303 572C311 613 312 615 348 615H431C509 615 522 603 532 581C544 555 546 531 545 491L574 493C583 555 592 631 593 650Z" id="g113-70"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="616" vert-adv-y="616"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,7.943,3.132)"><path d="M245 635C92 635 37 457 37 312C37 149 91 -12 244 -12C395 -12 449 166 449 312C449 469 395 635 245 635ZM243 598C332 598 358 454 358 312C358 173 334 26 245 26C158 26 128 174 128 313S152 598 243 598Z" id="g50-49"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,12.375,3.132)"><path d="M462 177V227H365V632H320C217 496 116 350 21 208V177H284V109C284 43 280 38 190 31V0H451V31C369 38 365 43 365 108V177H462ZM284 227H88C155 336 218 430 282 519H284V227Z" id="g50-53"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g></svg>, and conductivity, on reaction RF power. For the conductivity, the open and closed circle symbols, respectively, represent photo- and dark conductivities.</div>

International Journal of Photoenergy

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Figure 2

Figure 2: Optimization of <i>μ</i>c-Si<sub>1−<i>x</i></sub>Ge<sub><i>x</i></sub>:H Single-Junction Solar Cells with Enhanced Spectral Response and Improved Film Quality 

International Journal of Photoenergy

Optimization of μc-Si1−xGex:H Single-Junction Solar Cells with Enhanced Spectral Response and Improved Film Quality

Figure 2

Optimization of μc-Si_1−xGe_x:H Single-Junction Solar Cells with Enhanced Spectral Response and Improved Film Quality