Effect of Plasma, RF, and RIE Treatments on Properties of Double-Sided High Voltage Solar Cells with Vertically Aligned p-n Junctions

Figure 1

Schematic view of the holder and the setup for treatments and measurements: (1)—base; (2)—beryllium-copper springs; (3)—isolator template; (4)—Ag contacts for measurement of - characteristics; (5)—a single SC with VA p-n junction; (6)—imitators of solar irradiation; (7)—upper electrode for vacuum PECVD method; (8)—loaded - setup; and (9)—compensating - setup.