Effect of Plasma, RF, and RIE Treatments on Properties of Double-Sided High Voltage Solar Cells with Vertically Aligned p-n Junctions

Figure 2

Images of the surface of Si-SC with VA p-n junction under 500x magnification. (a) after mechanical processing; (b) after RF treatments; (c) after RF treatments and DLCF coating; and (d) surface patterns of module.

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(b)

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