Effect of Plasma, RF, and RIE Treatments on Properties of Double-Sided High Voltage Solar Cells with Vertically Aligned p-n Junctions

Figure 5

Normal incidence diffuse reflection of a set of MJ Si-SCs: (1)—initial; (2)—after RF treatments (back side of SC); (3)—after RF treatments (front side of SC); (4)—after plasma treatments and deposition of DLCF. Inset: Normal incidence specular reflection of a series of MJ Si-SCs: (1)—initial; (2)—after plasma treatments and deposition of DLCF.