Effect of Plasma, RF, and RIE Treatments on Properties of Double-Sided High Voltage Solar Cells with Vertically Aligned p-n Junctions

Table 1

The specific parameters of single element of a SC with vertically aligned p-n junction obtained by the compensated technique.

Parameters	Initial AM1.5 (compensated)	5 min	5 min + 5 min	5 min + 5 min + 5 min + DLC 70 nm
/,; short-circuit current	1	1.19	1.26	1.42
/,; open-circuit voltage	1	1	1.04	1.08
FF/,; fill factor	1	0.97	1.02	1.05
/,; efficiency	1	1.15	1.34	1.6
/,; series resistance	1	0.8	0.77	0.73
/,; shunt resistance	1	1.3	0.5	2

Values of the resistances were estimated from the light - characteristics.