Effect of Plasma, RF, and RIE Treatments on Properties of Double-Sided High Voltage Solar Cells with Vertically Aligned p-n Junctions

Table 2

Parameters of multijunction SCs cells under light illumination.

Treatments	, cm^2	, mA	, V	, %	FF
AM1.5 (compensated), initial	6	0.91	11.76	0.954	0.538
AM1.5 (compensated), DLC 70 nm	6	0.918	11.72	1.32	0.734
RIE	6	9.69	11.86	10.12	0.53
RIE + RF	6	10.12	11.87	12.61	0.63
AM1.5 (loaded), DLC 70 nm	6	0.912	11.71	1.31	0.736
100AM1.5 (loaded, pulse), DLC 70 nm	6	99.06	16.61	2.1	0.75