Research Article
H2O/O2 Vapor Annealing Effect on Spin Coating Alumina Thin Films for Passivation of Silicon Solar Cells
Figure 1
XPS spectra of Al-acac-based AlOx formed in various ambients (H2O/O2, O2, and air): (a) wide spectrum (0-1000 eV) and (b) expansion spectrum (55-175 eV).
| (a) |
| (b) |