High Performance of IZO Coated on PET Substrate for Electroluminescence Device Using Oxygen Plasma Treatment

Table 1

XRD data of the IZO obtained from study to those of the films deposited by plasma power of 300 W, 200 W, 100 W, and untreated.

Plasma power (W)	(°)	FWHM (°)	(A)	Grain size (nm)
Untreated	33.13	0.412	2.4215	16.8
100	31.32	0.568	2.2398	14.9
200	30.65	0.653	2.1569	13.1
300	30.11	0.745	2.1086	12.2