Research Article

Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

Figure 1

XPS overview scans of TiO2 with (a) H2O and (b) O3 as reactant at varying deposition temperatures and 1000 deposition cycles.
(a)
(b)