Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

<div>XPS detailed scans of Ti 2p, O 1s, and C 1s of TiO2 samples with (a, c, e) H2O and (b, d, f) O3 as reactant at varying deposition temperatures and 1000 deposition cycles.</div>

International Journal of Photoenergy

fig2

Figure 2

Figure 2: Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

Figure 2 | Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 