Controlled Crystallinity of TiO<sub>2</sub> Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

<div>TEM and SAD images of TiO<sub>2</sub> layers fabricated with H<sub>2</sub>O as reactant at deposition temperatures of (a) 100, (b) 200, and (c) 300°C and 800 deposition cycles.</div>

International Journal of Photoenergy

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Figure 4

Figure 4: Controlled Crystallinity of TiO<sub>2</sub> Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 

Figure 4 | Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 