Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone

Table 2

Removal rates of polymers using wet ozone.

Polymer samples	Removal rates (μm/min)
AZ6112	1.01
Novolak resin	0.96
cis-1,4-polyisoprene	0.61
PVP	0.35
PS	0.12
PMMA	0.01
PVC	0