International Journal of Polymer Science / 2014 / Article / Fig 1

Research Article

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Figure 1

Atomic force microscope images of PZT thin films with thickness of about 150 nm annealed at various temperatures for 8 min: scan on a square area.
(a) PZT thin films annealed at 500°C
(b) PZT thin films annealed at 600°C
(c) PZT thin films annealed at 700°C

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