Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Figure 1

Atomic force microscope images of PZT thin films with thickness of about 150 nm annealed at various temperatures for 8 min: scan on a 3×3 𝜇m² square area.

(a) PZT thin films annealed at 500°C

(b) PZT thin films annealed at 600°C

(c) PZT thin films annealed at 700°C