Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Figure 3

Curvature radius curves were tested via the step profiler after thin film deposition.

(a) Curvature radius curves of Pt/Ti layer

(b) Curvature radius curves of the PZT thin film with thickness of 150 nm

(c) Curvature radius curves of the PZT thin film with thickness of 300 nm

(d) Curvature radius curves of the PZT thin film with thickness of 600 nm