Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="574684.fig.004a" src="https://static.hindawi.com/articles/ijps/volume-2014/574684/figures/574684.fig.004a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Dielectric constant</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="574684.fig.004b" src="https://static.hindawi.com/articles/ijps/volume-2014/574684/figures/574684.fig.004b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Dielectric loss coefficient</td></tr></table></td></tr></table>

<table>Dielectric constant and dielectric loss coefficient of PZT thin films with different thicknesses.</table>

International Journal of Polymer Science

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Figure 4

Figure 4: Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes 