Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes
Table 1
Average residual stress and thermal stress in Pt/Ti layer annealed at different temperatures.
Annealing temperature
Without annealing
500°C
600°C
700°C
Radius of curvature: (mm)
44035
5049
4169
4824
Average residual stress: (MPa)
85.6
747
904
781
Thermal stress: (MPa)
0
1320
1583
1874
We are committed to sharing findings related to COVID-19 as quickly as possible. We will be providing unlimited waivers of publication charges for accepted research articles as well as case reports and case series related to COVID-19. Review articles are excluded from this waiver policy. Sign up here as a reviewer to help fast-track new submissions.
