Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td align="left">Annealing temperature</td><td align="center">Without annealing</td><td align="center">500°C</td><td align="center">600°C</td><td align="center">700°C</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left">Radius of curvature: <svg height="11.3125" id="M21" style="vertical-align:-0.1092pt" version="1.1" viewbox="0 0 11.075 11.3125" width="11.075" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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t-115.5 -72q40 -86 66 -133q39 -68 65 -101q28 -37 73 -51zM491 483q0 67 -33.5 101t-91.5 34q-35 0 -51 -10q-13 -8 -20 -48l-45 -245h49q71 0 113 28q79 52 79 140z" id="x1D445"></path></g>
</svg> (mm)</td><td align="center">44035</td><td align="center">5049</td><td align="center">4169</td><td align="center">4824</td></tr><tr><td align="left">Average residual stress: <svg height="12.325" id="M22" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 15.375 12.325" width="15.375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,8.038)"><path d="M548 455q-32 -77 -74 -77q-37 0 -103 10l-3 -2q36 -30 48.5 -62t12.5 -80q0 -103 -75 -179.5t-175 -76.5q-70 0 -113 45t-43 128q0 115 83.5 200.5t209.5 85.5q31 0 77.5 -4t67.5 -4q36 0 62 30zM350 274q0 54 -17 86q-19 35 -57 35q-50 0 -90 -37.5t-59 -91.5t-19 -109
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<g transform="matrix(.012,-0,0,-.012,9.663,12.112)"><path d="M393 379q-9 -16 -28 -29q-15 -10 -23 -2q-19 19 -36 19q-21 0 -52 -38q-57 -72 -82 -126l-40 -197q-23 -3 -75 -18l-7 7q49 196 74 335q7 43 -2 43q-7 0 -30 -14.5t-47 -37.5l-16 23q37 42 82 73t67 31q41 0 15 -113l-11 -50h4q41 71 85 117t77 46q29 0 45 -26
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</svg> (MPa)</td><td align="center">85.6</td><td align="center">747</td><td align="center">904</td><td align="center">781</td></tr><tr><td align="left">Thermal stress: <svg height="12.325" id="M23" style="vertical-align:-3.39064pt" version="1.1" viewbox="0 0 47.900002 12.325" width="47.900002" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,8.038)"><path d="M548 455q-32 -77 -74 -77q-37 0 -103 10l-3 -2q36 -30 48.5 -62t12.5 -80q0 -103 -75 -179.5t-175 -76.5q-70 0 -113 45t-43 128q0 115 83.5 200.5t209.5 85.5q31 0 77.5 -4t67.5 -4q36 0 62 30zM350 274q0 54 -17 86q-19 35 -57 35q-50 0 -90 -37.5t-59 -91.5t-19 -109
q0 -61 24.5 -96.5t65.5 -35.5q51 0 87.5 46.5t50.5 100.5t14 102z" id="x1D70E"></path></g>
<g transform="matrix(.012,-0,0,-.012,9.663,12.112)"><path d="M298 36l-68 -35q-25 -13 -42 -13q-98 0 -98 119v290h-69l-4 11l28 29h45v72l65 67l14 -2v-137h113q8 -8 6 -21t-12 -19h-107v-256q0 -96 59 -96q29 0 61 17z" id="x74"></path></g><g transform="matrix(.012,-0,0,-.012,13.363,12.112)"><path d="M513 0h-211v26q44 5 55 17t11 60v166q0 123 -98 123q-59 0 -104 -51v-238q0 -48 10 -60.5t55 -16.5v-26h-213l1 26q46 4 57 16t11 61v477q0 48 -9.5 58.5t-58.5 14.5v24q63 9 147 35v-336q73 73 143 73q64 0 101 -42t37 -129v-175q0 -49 11 -61t55 -16v-26z" id="x68"></path></g><g transform="matrix(.012,-0,0,-.012,19.681,12.112)"><path d="M380 106l15 -22q-42 -52 -87 -74t-76 -22q-89 0 -142 62t-53 151q0 103 66 175q67 73 146 73h1q61 0 105.5 -46.5t44.5 -105.5q0 -16 -4.5 -22.5t-18.5 -9.5q-54 -10 -262 -17q1 -95 46 -143.5t104 -48.5q61 0 115 50zM225 412q-35 0 -64.5 -32.5t-40.5 -90.5q83 0 170 3
q14 0 19 4.5t5 15.5q1 41 -23.5 70.5t-65.5 29.5z" id="x65"></path></g><g transform="matrix(.012,-0,0,-.012,24.738,12.112)"><path d="M181 342h2q63 107 121 107q24 0 41 -16t17 -34q0 -34 -32 -49q-17 -7 -26 2q-21 20 -43 20q-20 0 -42 -22t-38 -63v-183q0 -50 12.5 -62t69.5 -16v-26h-230v26q47 5 58 17t11 61v207q0 49 -9 60.5t-53 16.5v23q74 12 141 40v-109z" id="x72"></path></g><g transform="matrix(.012,-0,0,-.012,29.212,12.112)"><path d="M797 0h-214v26q46 5 58 17.5t12 63.5v167q0 116 -88 116q-48 0 -112 -52q3 -18 3 -42v-195q0 -46 11 -58t53 -17v-26h-214v26q48 5 59.5 17t11.5 60v172q0 115 -88 115q-47 0 -109 -52v-235q0 -47 10 -59.5t48 -17.5v-26h-211v26q50 5 62.5 17t12.5 60v207q0 48 -9 59.5
t-52 18.5v23q79 14 139 41v-81q3 2 29 20.5t44 29.5q45 28 81 28t66 -22t46 -61q25 20 83 57q39 26 76 26q59 0 93 -40t34 -113v-193q0 -49 10.5 -60.5t54.5 -16.5v-26z" id="x6D"></path></g><g transform="matrix(.012,-0,0,-.012,38.933,12.112)"><path d="M433 39l-85 -51q-27 0 -47 20q-16 16 -24 44q-5 -3 -24 -16.5t-27 -18.5t-23 -13.5t-25 -12t-19 -3.5q-52 0 -86 36.5t-34 85.5q0 71 81 99q128 43 155 65v17q0 54 -23 83.5t-62 29.5q-28 0 -45 -19t-29 -66q-7 -23 -29 -23q-15 0 -29 13t-14 30t31 40q25 19 68.5 40.5
t81.5 29.5q49 0 82 -27q45 -39 45 -123v-185q0 -60 35 -60q18 0 36 11zM275 84v156q-12 -6 -49 -23t-41 -19q-31 -14 -46 -31t-15 -43q0 -35 22.5 -55.5t48.5 -20.5q19 0 42 10.5t38 25.5z" id="x61"></path></g><g transform="matrix(.012,-0,0,-.012,44.205,12.112)"><path d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" id="x6C"></path></g>
</svg> (MPa)</td><td align="center">0</td><td align="center">1320</td><td align="center">1583</td><td align="center">1874</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Average residual stress and thermal stress in Pt/Ti layer annealed at different temperatures.

International Journal of Polymer Science

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Table 1