International Journal of Polymer Science / 2014 / Article / Tab 1

Research Article

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Table 1

Average residual stress and thermal stress in Pt/Ti layer annealed at different temperatures.

Annealing temperatureWithout annealing500°C600°C700°C

Radius of curvature: (mm)44035504941694824
Average residual stress: (MPa)85.6747904781
Thermal stress: (MPa)0132015831874

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