A Methodology for an FPGA Implementation of a Programmable Logic Controller to Control an Atomic Layer Deposition System

<div>Simplified switching topologies used for interfacing the FPGA and ALD: (a) the switch used as an inverting, low-side switch to convert 24 V ALD signals to 3.3 V FPGA signals and (b) the switch used as a noninverting high-side switch to drive 24 V inductive ALD loads from a 3.3 V FPGA signal.</div>

International Journal of Reconfigurable Computing

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Figure 8

Figure 8: A Methodology for an FPGA Implementation of a Programmable Logic Controller to Control an Atomic Layer Deposition System 