Modeling and Simulation of  a Chemical  Vapor Deposition

<table>Deposition rates for one point source at <svg height="13.6375" id="M280" style="vertical-align:-2.21957pt" version="1.1" viewbox="0 0 48.299999 13.6375" width="48.299999" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,13.6375)">
<g transform="translate(72,-61.09)">
<text transform="matrix(1,0,0,-1,-71.95,63.35)">
<tspan style="font-size: 12.50px; " x="0" y="0">(</tspan>
<tspan style="font-size: 12.50px; " x="4.1634989" y="0">5</tspan>
<tspan style="font-size: 12.50px; " x="10.414999" y="0">0</tspan>
<tspan style="font-size: 12.50px; " x="16.666498" y="0">,</tspan>
<tspan style="font-size: 12.50px; " x="21.867746" y="0">2</tspan>
<tspan style="font-size: 12.50px; " x="28.119247" y="0">0</tspan>
<tspan style="font-size: 12.50px; " x="34.370747" y="0">)</tspan>
</text>
</g>
</g>
</svg>, with 25 time steps (<svg height="7.1624999" id="M281" style="vertical-align:-0.11285pt" version="1.1" viewbox="0 0 8.7250004 7.1624999" width="8.7250004" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,7.1625)">
<g transform="translate(72,-66.27)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑥</tspan>
</text>
</g>
</g>
</svg>-axis: time scale in (nsec), <svg height="9.8625002" id="M282" style="vertical-align:-2.29482pt" version="1.1" viewbox="0 0 7.875 9.8625002" width="7.875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,9.8625)">
<g transform="translate(72,-64.11)">
<text transform="matrix(1,0,0,-1,-71.95,66.45)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑦</tspan>
</text>
</g>
</g>
</svg>-axis: deposition rate in (mol/nsec)).</table>

Journal of Applied Mathematics

Modeling and Simulation of a Chemical Vapor Deposition

Figure 9