Journal of Applied Mathematics

Research Article

Modeling and Simulation of a Chemical Vapor Deposition

Table 11

Rate of concentration.
Rate
S i C s o u r c e , m a x ∶ S i C t a r g e t , m a x 9 ⋅ 1 0 6 ∶ 6 . 5 ⋅ 1 0 6 = 1 . 3 8