Research Article

Modeling and Simulation of a Chemical Vapor Deposition

Table 5

Model parameters.

Density 𝜌 = 1 . 0
Mobile porosity 𝜙 = 0 . 3 3 3
Immobile porosity 0.333
Diffusion 𝐷 = 0 . 0
Longitudinal dispersion 𝛼 𝐿 = 0 . 0
Transversal dispersion 𝛼 𝑇 = 0 . 0 0
Retardation factor 𝑅 = 1 0 0 𝑒 4 (Henry rate)
Velocity field 𝐯 = ( 0 . 0 , 4 . 0 1 0 8 ) 𝑡
Decay rate of species of 1st EX 𝜆 𝐴 𝐵 = 1 1 0 6 8
Decay rate of species of 2nd EX 𝜆 𝐴 𝐵 = 2 1 0 8 , 𝜆 𝐵 𝑁 𝑁 = 1 < 1 0 6 8
Decay rate of species of 3rd EX 𝜆 𝐴 𝐵 = 0 . 2 5 1 0 8 , 𝜆 𝐶 𝐵 = 0 . 5 1 0 8

Geometry (2D domain) Ω = [ 0 , 1 0 0 ] × [ 0 , 1 0 0 ]
Boundary Neumann boundary at top, left, and right boundaries
Outflow boundary at bottom boundary