A Fuzzy Rule for Improving the Performance of Multiobjective Job Dispatching in a Wafer Fabrication Factory

Table 3

The steps of fabricating a semiconductor product.

Step	Step no.	Machine	Machine no.
OXWS	1	4HTB, 6HTB, 2DOD, 3DOD, 1WOD, 3WOD, 4WOD, 5WOD	1, 2, 3, 4, 5, 6, 7, 8
MKWF	2	1PFC, 2PFC	9, 10
ALZER	3	7B-I200	11
ETZER	4	1B-DP5KZ	12
STZER	5	1B-DASP, 3B-DASP, 1B-DULT, 2B-DULT, 9B-DULT, 10B-DULT	13, 14, 15, 16, 17, 18
ALNW	6	10B-I100, 9B-I100, 5B-I200, 7B-I200, 11B-I80	19, 20, 21, 11, 22
⋮
QCOG	121	4HTB, 6HTB, 2DOD, 3DOD, 1WOD, 3WOD, 4WOD, 5WOD	1, 2, 3, 4, 5, 6, 7, 8