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Journal of Applied Mathematics
Volume 2014 (2014), Article ID 192891, 7 pages
http://dx.doi.org/10.1155/2014/192891
Research Article

Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect

Cheng Bai1,2 and Jin Huang1,3

1Research Institute on Mechatronics, Xidian University, Xi’an 710071, China
2Xi’an Communication Institute, Xi’an 710106, China
3Key Laboratory of Electronic Equipment Structure Design, Xidian University, Ministry of Education, Xi’an 710071, China

Received 21 February 2014; Revised 6 May 2014; Accepted 14 May 2014; Published 26 May 2014

Academic Editor: Ricardo Perera

Copyright © 2014 Cheng Bai and Jin Huang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Cheng Bai and Jin Huang, “Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect,” Journal of Applied Mathematics, vol. 2014, Article ID 192891, 7 pages, 2014. doi:10.1155/2014/192891