Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="192891.fig.001a" src="https://static.hindawi.com/articles/jam/volume-2014/192891/figures/192891.fig.001a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Cross-section view</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="192891.fig.001b" src="https://static.hindawi.com/articles/jam/volume-2014/192891/figures/192891.fig.001b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Top view</td></tr></table></td></tr></table>

<table>Schematic diagram of a normal moving MEMS device.</table>

Journal of Applied Mathematics

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Figure 1

Figure 1: Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect 