Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect

Table 1

Comparison of squeeze film damping between analytical models and simulation results in normal motion.

Case	Dimension 10^−6 m			Simulation Force N	Ideally vented model		Our model
	𝑎, 𝑏	𝐻0	𝛿		Force N	Error rate	𝑃BC	Force N	Error rate
1	400	40	60	3.5447𝑒−8	2.9909𝑒−8	15.62%	0.026	3.4046𝑒−8	3.95%
2	400	40	50	4.1837𝑒−8	2.9909𝑒−8	28.51%	0.043	3.6601𝑒−8	1.63%
3	400	40	40	5.5220𝑒−8	2.9909𝑒−8	45.84%	0.081	4.2217𝑒−8	23.55%