Optimal Inversion Feedforward and Robust Feedback Based 2DOF Control Approach for High Speed-Precision Positioning Systems

Table 1

Comparison of positioning control error.

Frequency	(um)			(um)
	(1)	(2)	(3)	(1)	(2)	(3)
5 HZ	0.0019	0.0027	0.0138	0.0002	0.0003	0.0073
50 HZ	0.0034	0.0061	0.0258	0.0003	0.0034	0.0148
125 HZ	0.0057	0.0103	0.0447	0.0008	0.0054	0.0303