Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Figure 1

MEMS tunable capacitor; (a) its model and pull-in point: pull-in point transpires when movable electrode reaches one-third of its initial distance to fixed electrode; (b) tunable capacitor mislays its stability beyond pull-in voltage; (c) top plate puts in motion in a piston way; (d) lumped model of the MEMS tunable capacitor.

(a)

(b)

(c)

(d)