Journal of Control Science and Engineering / 2017 / Article / Fig 8

Research Article

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Figure 8

Mechanical analysis: ((a) and (b)) deformation of top plate and its displacement in modal analysis carried out in 10 modes; deformation in mode 1 and in mode 9; (c) spectrum of control effort signal in the adaptive sliding mode controller.
(a)
(b)
(c)

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