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Journal of Control Science and Engineering
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Journal of Control Science and Engineering
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2017
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Article
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Tab 1
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Research Article
Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source
Table 1
Main parameters of tunable capacitor of the MEMS AC voltage reference.
Parameter
Real value
Parameter
Real value
Kg
2338 N/m
0.01 Ns/m
2
μ
m