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Journal of Engineering
Volume 2014, Article ID 715167, 8 pages
http://dx.doi.org/10.1155/2014/715167
Research Article

The Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature

1Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
2Queensland Micro- and Nanotechnology Centre (QMNC), Griffith University, Brisbane, QLD 4111, Australia

Received 18 December 2013; Accepted 29 April 2014; Published 22 May 2014

Academic Editor: Sheng-Rui Jian

Copyright © 2014 N. Marsi et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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