Low Actuating Voltage Spring-Free RF MEMS SPDT Switch

Figure 4

(a) Top view, (b) cross-sectional view in ON state, and (c) cross-sectional view in OFF state at the bridge and contact area.

(a) Top view of the bridge and contact area

(b) Cross-sectional view of the bridge and contact area in ON state

(c) Cross-sectional view of the bridge and contact area in OFF state