Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering

Figure 10

SEM images of typical film cross-sections: (a) pyramidal surface with 𝑃_𝑃=0.53𝑃𝑎 and 𝑇_𝑠=200 ^°C , (b) amorphous surface with 𝑃_𝑃=1.06𝑃𝑎 and 𝑇_𝑠=15 ^°C, (c) transitional surface with 𝑃_𝑃=0.53𝑃𝑎 and 𝑇_𝑠= 600 ^°C, and (d) columnar/stratified surface with 𝑃_𝑃=1.07𝑃𝑎 and 𝑇_𝑠= 600 ^°C.

(a)

(b)

(c)

(d)