Pressure and Temperature Effects on Stoichiometry and Microstructure of Nitrogen-Rich TiN Thin Films Synthesized via Reactive Magnetron DC-Sputtering

Figure 5

SEM images of increasing 𝑃_𝑃 at 𝑇_𝑆 = 200^∘C with a) 0.26 𝑃𝑎, b) 0.53 𝑃𝑎, c) 1.07 𝑃𝑎 and d) 1.60 𝑃𝑎.

(a)

(b)

(c)

(d)