Conductivity-Type Sensor Based on  CNT-<svg     style="vertical-align:-4.49648pt;width:46.275002px;" id="M1" height="20.625" version="1.1" viewBox="0 0 46.275002 20.625" width="46.275002"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,-0,0,-.022,.062,14.975)"><path id="x57" d="M956 650v-28q-52 -7 -69 -22.5t-39 -77.5q-60 -175 -165 -533h-31l-175 499h-2l-163 -499h-31l-164 535q-18 60 -36 76.5t-65 21.5v28h243v-28q-53 -7 -63 -18.5t3 -49.5l122 -412h2l162 499h29l175 -500h2q87 277 113 401q12 45 0.5 59t-68.5 21v28h220z" /></g><g transform="matrix(.022,-0,0,-.022,20.999,14.975)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g><g transform="matrix(.016,-0,0,-.016,37.738,20.35)"><path id="x1D7D1" d="M58 524l-21 12q80 152 229 152q73 0 119 -41q45 -41 45 -96q0 -40 -21.5 -74.5t-62.5 -52.5q57 -20 89.5 -68.5t32.5 -109.5q0 -110 -86 -185t-214 -75q-69 0 -110.5 24.5t-41.5 65.5q0 26 18.5 43t46.5 17q45 0 96 -57q39 -43 79 -43q45 0 71.5 34t26.5 88q0 75 -49 121
q-25 23 -56 39q-34 17 -97 38v17q69 21 100 53t31 78q0 103 -99 103q-40 0 -69.5 -19t-56.5 -64z" /></g></svg> Composite for NO<sub>2</sub> Detection

<table>Schematic diagram of Au electrode with the gap
of 5 <svg height="12.175" id="M43" style="vertical-align:-3.56265pt" version="1.1" viewbox="0 0 9.5625 12.175" width="9.5625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.675)"><path d="M538 96q-38 -45 -84 -76.5t-71 -31.5q-44 0 -15 117q12 49 18 89h-2q-99 -128 -163 -178q-36 -28 -70 -28q-26 0 -44 38h-2q-16 -69 -16 -129q0 -43 11 -75.5t24 -42.5l1 -6q-7 -12 -24.5 -23t-37.5 -11q-40 0 -40 76q0 52 35 202l94 407l78 24l5 -5q-32 -122 -72 -310
q-7 -33 0 -55t25 -22q36 0 105.5 75t107.5 145l32 146l75 26h10q-50 -197 -78 -347q-7 -38 6 -38q7 0 31 17t47 39z" id="x1D707"></path></g>
</svg>m and line width of 20 <svg height="12.175" id="M44" style="vertical-align:-3.56265pt" version="1.1" viewbox="0 0 9.5625 12.175" width="9.5625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.675)"><path d="M538 96q-38 -45 -84 -76.5t-71 -31.5q-44 0 -15 117q12 49 18 89h-2q-99 -128 -163 -178q-36 -28 -70 -28q-26 0 -44 38h-2q-16 -69 -16 -129q0 -43 11 -75.5t24 -42.5l1 -6q-7 -12 -24.5 -23t-37.5 -11q-40 0 -40 76q0 52 35 202l94 407l78 24l5 -5q-32 -122 -72 -310
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</svg>m on Si<svg height="15.5125" id="M45" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 19.1625 15.5125" width="19.1625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.363)"><path d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" id="x4F"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.763,15.45)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg> substrate fabricated by
means of photolithography (lift off).</table>

Journal of Nanomaterials

fig1

Figure 1

Figure 1: Conductivity-Type Sensor Based on  CNT-<svg     style="vertical-align:-4.49648pt;width:46.275002px;" id="M1" height="20.625" version="1.1" viewBox="0 0 46.275002 20.625" width="46.275002"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,-0,0,-.022,.062,14.975)"><path id="x57" d="M956 650v-28q-52 -7 -69 -22.5t-39 -77.5q-60 -175 -165 -533h-31l-175 499h-2l-163 -499h-31l-164 535q-18 60 -36 76.5t-65 21.5v28h243v-28q-53 -7 -63 -18.5t3 -49.5l122 -412h2l162 499h29l175 -500h2q87 277 113 401q12 45 0.5 59t-68.5 21v28h220z" /></g><g transform="matrix(.022,-0,0,-.022,20.999,14.975)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g><g transform="matrix(.016,-0,0,-.016,37.738,20.35)"><path id="x1D7D1" d="M58 524l-21 12q80 152 229 152q73 0 119 -41q45 -41 45 -96q0 -40 -21.5 -74.5t-62.5 -52.5q57 -20 89.5 -68.5t32.5 -109.5q0 -110 -86 -185t-214 -75q-69 0 -110.5 24.5t-41.5 65.5q0 26 18.5 43t46.5 17q45 0 96 -57q39 -43 79 -43q45 0 71.5 34t26.5 88q0 75 -49 121
q-25 23 -56 39q-34 17 -97 38v17q69 21 100 53t31 78q0 103 -99 103q-40 0 -69.5 -19t-56.5 -64z" /></g></svg> Composite for NO<sub>2</sub> Detection 

Journal of Nanomaterials

Conductivity-Type Sensor Based on CNT- Composite for NO2 Detection

Figure 1

Conductivity-Type Sensor Based on CNT- Composite for NO₂ Detection