Modeling and Formulation of a Novel Microoptoelectromechanical Gyroscope

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<g transform="matrix(.017,-0,0,-.017,13.825,12.013)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g><g transform="matrix(.017,-0,0,-.017,20.828,12.013)"><path d="M414 650l-6 -28q-63 -4 -78.5 -17.5t-27.5 -71.5l-77 -416q-11 -58 0.5 -71.5t77.5 -17.5l-5 -28h-275l8 28q63 4 79.5 18.5t27.5 70.5l80 416q11 57 -2 71t-81 18l6 28h273z" id="x1D43C"></path></g>
</svg> and gap distance <svg height="7.9499998" id="M82" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 9.625 7.9499998" width="9.625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg>.</table>

Journal of Nanomaterials

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Figure 7

Figure 7: Modeling and Formulation of a Novel Microoptoelectromechanical Gyroscope 