Synthesis of Nanostructured Nanoclay-Zirconia Multilayers: a Feasibility Study

Table 1

EDXS compositional analysis. Each value is the average of three measurements. The measured excessive amounts of Si and O are from Si/SiO₂ substrates, an artifact due to the spread of electron beams.

Element	Atomic %
	As-deposited	Annealed
O	61.7	35.3
Al	3.6	1.2
Si	30.6	59.9
Zr	4	3.6