Enhanced Mechanical Properties in Organofluorosilica Thin Films

Table 1

Sol compositions and identification of the thin films prepared. The spin-up conditions were 18 seconds at 1000 rpm for all the films. 𝑡₂—spin-off period in seconds; 𝑟₂—spin-off velocity in rotations per minute TFPTMS: trifluoropropyl-trimethoxysilane, TDOFTES: 3,3,4,4,5, 5,6,6,7,7,8,8,8-tridecaoctafluoro-triethoxysilane, TDF: tridecafluoroethanol.

Film designation	Sol composition							Total volume/𝜇L	Hydrolysis time	𝑡2/s; 𝑟2/rpm
	volume/𝜇L
	TFPT	TDOFTES	CH3OH	NaF	H2O	TDF	HCl
	MS			(10 mM)			(10 mM)
TFP3^(a)	700	—	1151	35.6	220	—	—	2106.6	15 min	60; 3000
TFP5	700	—	1151	35.6	220	—	—	2106.6	15 min	60; 5000
PF03^(b)	—	1384	1151	35.6	220	3176	—	5966.6	15 min	60; 3000
PF04	—	1384	1151	35.6	220	3176	—	5966.6	15 min	60; 4000
PF05	—	1384	1151	35.6	220	3176	—	5966.6	15 min	60; 5000
PF06	—	1384	1151	35.6	220	3176	—	5966.6	15 min	60; 6000
PF07	—	1384	1151	35.6	220	3176	—	5966.6	15 min	60; 7000
PF08	—	1384	1151	35.6	220	3176	—	5966.6	15 min	60; 8000
TFA3^(a)	700	—	1151	—	220	—	35.6	2106.6	7 h	60; 3000
TFA5	700	—	1151	—	220	—	35.6	2106.6	7 h	60; 5000
Si0Me	—	—								60; 3000
Si100Me	—	—								60; 3000

(a)Molar ratios: Si:H₂O:NaF:MeOH = 1:4:10^-4:8(b)Molar ratios: Si:H₂O:NaF:MeOH:TDF = 1:4:10^-4:8:4.