Research Article
Enhanced Mechanical Properties in Organofluorosilica Thin Films
Table 2
Hardness (
) and modulus (
) for the
fluorinated thin films.
| | Film | /GPa | /GPa |
| | TFP3 | 7.9 | 80.0 | | TFP5 | 6.8 | 77.6 | | PF03 | 7.6 | 79.3 | | PF04 | 6.9 | 78.4 | | PF05 | 6.8 | 78.3 | | PF06 | 6.7 | 77.0 | | PF07 | 7.0 | 78.2 | | PF08 | 7.1 | 79.1 | | TFA3 | 6.8 | 77.4 | | TFA5 | 6.8 | 77.1 | | Si0Me | 4.2 | 33.4 | | Si100Me | 1.4 | 8.6 | | Substrate | 7.1 | 78.9 |
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